Site Map | Faculty Intranet | Staff Intranet | Student Intranet |

Katsuo Kurabayashi

Portrait of Katsuo Kurabayashi

Katsuo Kurabayashi

Professor, Mechanical Engineering; Associate Chair for Graduate Education, Mechanical Engineering; Professor, Electrical Engineering and Computer Science
2380B GGB (George G. Brown Laboratory)
2350 Hayward
Ann Arbor, MI 48109-2125
Map It!

Phone: (734) 615-5211
Fax: (734) 647-3170

Individual Home Page


Ph.D., Materials Science and Engineering, Stanford University, 1998
M.S., Materials Science and Engineering, Stanford University, 1994
B.S., Precision Engineering, University of Tokyo, 1992

Research Interests

Microelectromechanical systems; microscale thermal engineering and design; heat transfer in micro/nano structures; semiconductor processing for micromechanical structure fabrication; microfluidic device; sensors and actuators.

Honors and Awards

Outstanding Professor Award, Pi Tau Sigma, April 2007

Visiting Professorship, Tokyo Instutute of Technology, May 2006 - August 2006

Early Faculty Career Development (CAREER) Award, National Science Foundation, January 2001-December 2005

Robert Caddell Memorial Award, The University of Michigan, 2004-2005

Co-author of SPIE Best Student Paper Award (with Yi-Chung Tung), "Nano-Imprinted Strain-Controlled Elastomeric Gratings for Optical Wavelength Tuning with Visible Light", Optics East 2004, October 2004

Outstanding Paper Award, International VLSI Multilevel Interconnection Conference, 1998

Best Paper Award, TECHCON, Semiconductor Research Corporation (SRC), September 1998

In the News...

2016 - ME Faculty Published Popular Text Books and Research Papers Featured in Top Scientific Journals

2016 - Kurabayashi and Liang's research featured on cover of Journal of Vacuum Science and Technology B

2015 - Chance Encounter Leads to Use of Life-Saving Blood Analysis Device

2015 - ME Faculty Receive CoE Awards


See ME Course Information for more information about our courses offered and teaching histories.